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    Graphite thin film deposition using laser induced plasma
    (2011-05-02)
    Chaudhary, K. T.
    ;
    Qindeel, R.
    ;
    Saktioto
    ;
    Hussain, M. S.
    ;
    Ali, J.
    The Excimer KrF laser (of wave length 248 nm, pulse energy of 13-50 mJ and pulse width of 20 ns) has been used to ablate graphite solid target. Thin films of graphite material have been grown on silicon (Si) substrate at different temperatures (25°C & 300°C). The techniques x-ray diffraction (XRD) and scanning electron microscopy has been used to study the structure and surface morphology of the deposited thin films. The whole experiment has been performed in the stainless steel chamber under pressure 10-4 torr and each thin film has been deposited for 10,000 laser shots. The graphite thin film deposited at higher substrate temperature has smooth structure and the film is uniform.
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    Thermodynamic equilibrium for nitrogen species discharge: Comparison with global model
    (2011-03-01)
    Ismail, F. D.
    ;
    Saktioto, T.
    ;
    Fadhali, M.
    ;
    Yupapin, P. P.
    ;
    Qindeel, R.
    The equilibrium process of plasma nitrogen species by chemical kinetic reactions along various pressures is successfully investigated. The equilibrium process is required in industrial application to obtain the stable condition when heating up the material for having homogenous reaction. Nitrogen species densities is modeled by a continuity equation and extended Arrhenius form. These equations are used to integrate the change of density over the time. The integration is to acquire density and the reaction rate of each reaction where temperature and time dependence are imposed. A comparison is made with global model within pressure range of 1-100 mTorr and the temperature of electron is set to be higher than other nitrogen species. The results show that the chemical kinetic model only agrees for high pressure because of no power imposed; while the global model considers the external power along the pressure range then the electron and nitrogen species give highly quantity densities by factor of 3-5. © 2010 Elsevier GmbH. All rights reserved.