KMITL

Permanent URI for this communityhttps://dspace.kmitl.ac.th/handle/123456789/1

Browse

Settings

Author: search.filters.author.Duan, Mingzheng

Search Results

Now showing 1 - 2 of 2
  • Loading...
    Thumbnail Image
    Some of the metrics are blocked by your 
    consent settings
    Item type:Publication,
    Theoretical modeling and experimental investigation of in-phase resonant MEMS mirrors with cascaded structures
    (2024-05-01)
    Chen, Wenhao
    ;
    Luo, Huahuang
    ;
    Tavakkoli, Hadi
    ;
    Duan, Mingzheng
    ;
    Piyawattanametha, Wibool
    This paper proposes an efficient nonlinear one-dimensional (1D) compact mass-damper-spring model to predict the dynamic response of electrostatic resonant micro-electro-mechanical system (MEMS) mirrors with cascaded structures. The time-dependent damping moment due to viscous shear and pressure drag is computed using semi-empirical analytical equations for comb-drive structures and device frames. Nonlinear electrostatic force induced by the comb drives is efficiently acquired based on the hybrid method. The optimized device is fabricated using MEMS fabrication processes based on a 4-inch silicon-on-insulator wafer. The proposed compact model with the measured key parameters from the fabricated device shows excellent capability to accurately predict nonlinear dynamic responses of the fabricated device, including parametric excitation and hysteretic frequency response, with an average error of less than 5%. In particular, our 1D model is three orders of magnitude faster than the conventional finite element method model (0.8 s versus 1 h), enabling efficient system-level optimization of the critical design parameters. Based on the parametric study, electrode gap distance and torsion spring width are found to be two critical design parameters and dimensional analysis is conducted for design optimization with scan angle enhancing from 16.8° to 24° compared with the first design.
  • Loading...
    Thumbnail Image
    Some of the metrics are blocked by your 
    consent settings
    Item type:Publication,
    Theoretical and Experimental Study of Comb-Actuated Mirror with Cascaded Structures
    (2023-01-01)
    Chen, Wenhao
    ;
    Luo, Huahuang
    ;
    Duan, Mingzheng
    ;
    Tavakkoli, Hadi
    ;
    Piyawattanametha, Wibool
    For the first time, we present a two-dimensional theoretical model for one-dimensional comb-actuated MEMS mirror with cascaded structures. The numerical model including different damping mechanisms and nonlinear capacitive force is validated with experiment results. Stability analysis is conducted to simulate the nonlinear hysteretic frequency response. The model proposed can be a guideline for designing multi-degree-of-freedom nonlinear parametric-excited MEMS mirror with high frequency and large scan angle.