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Growth and characterization of zinc oxynitride thin films by reactive gas-timing RF magnetron sputtering
(2008-01-22)
Klaitabtim, Don
;
Pratontep, Sirapat
;
Nukeaw, Jiti
Nitrogen-doped zinc oxide (N:ZnO) films on glass substrates have been prepared by the reactive gas-timing rf magnetron sputtering of ZnO targets in a mixture of argon and nitrogen gases. Using this gas-timing technique, N:ZnO films were produced without any substrate heating. The nitrogen partial pressure during the sputtering process was periodically controlled by an on-off sequence. The structural and optical properties of the fabricated films were analyzed by X-ray diffraction (XRD) and optical absorption spectroscopy, respectively. The nitrogen composition of the N:ZnO films was quantified by X-ray photoelectron spectroscopy (XPS). In this study, we focused on investigating the effects of the nitrogen flow rate and the rf power on the structural properties, the nitrogen doping efficiency, and the optical band gap of N:ZnO films. A slight shift in the optical band gap to a higher energy was found when the nitrogen flow rate was increased or when the rf power was decreased. This coincides with an improvement in the crystallinity of the films. Gas-timing rf magnetron sputtering deposition is a simple method of fine-tuning material properties by slight modifications to the existing sputtering technique. © 2008 The Japan Society of Applied Physics.
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Design consideration and finite element modeling of MEMS cantilever for nano-biosensor applications
(2005-01-01)
Klaitabtim, Don
;
Tuantranont, Adisorn
This work has focused on the design and finite element modeling of a MEMS cantilever beam for biosensor applications. The stress induced on gold surface with polysilicon piezoresistive sensing is demonstrated. In principle, adsorption of biochemical species on a functionalized surface of the microfabricated cantilever will cause a surface stress and consequently the cantilever bending. The sensing mechanism relies on the piezoresistive properties of the polysilicon wire encapsulated in the beam. The beam is constructed and bending analysis is performed so that the beam tip deflection could be predicted. The twelve independent beams were combined onto a single chip. The piezoresistor designs on the beams were varied, within certain constraints, so that the sensitivity of the sensing technique could be studied. The chip was laid out using Tanner L-edit and the design rules of the MUMPs process were followed. The device model was simulated using CoventorWare™, a commercial finite element analysis (FEA) tool designed specifically for MEMS applications. Finally, the MEMS cantilever beam was operated and caused increment in tip deflection due to biochemical adsorption on the gold surface. ©2005 IEEE.
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Simulation and experiment of microheater for a microfluidic polymerase chain reaction device
(2004-12-01)
Klaitabtim, Don
;
Lomas, Tanom
;
Wisitsora-At, Anurat
;
Tuantranont, Adisorn
In this paper, we describe the simulation and experimental results of electroplated microheater for microfluidic-base polymerase chain reaction (PCR) device. This work used finite element analysis to simulate the temperature characteristics of a PCR device. The device consists of a reaction chamber using polydimethysiloxane (PDMS) with encapsulated micrhearter made of a nickel resistor wire. Design of the microheater mask layout using Tanner L-edit. Microheater can be made by low cost electroplating process. The temperature in the experiment was shown heating and cooling rates were 0.9°C/s and 0.8°C/s respectively. The thermal distribution of the device was also studied through finite elements modeling then compare to the experimental results. © 2004IEEE.

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