This paper presents the new model of 5-contacts vertical Hall device. Despite of the induced force from Hall electric field act upon the current along the contacts for induced Hall voltage, there are some deviation currents from the middle contact that contribute the Hall voltage. The deviation current pass through the bulk resistance causes the voltage drop between the voltage contacts. From this study for n-type substrate, the deviation current created voltage about 20-30 percent of the total Hall voltage that mean it is the importance mechanism for vertical Hall device. This study used 3-D simulation by Sentaurus TCAD.
