This study investigated microstructure of SnO<inf>2</inf> thin films deposited by ultrasonic spray pyrolysis technique using 0.2 M of SnCl<inf>4</inf>·5H<inf>2</inf>O in absolute ethanol as a precursor. The deposition temperature (350-450 °C) and time (20-90 min) were varied. The influence of film-deposition conditions on grain size and orientation were discussed. The deposited SnO<inf>2</inf> films were textured polycrystalline films. The preferred orientation of SnO<inf>2</inf> films were quantitatively evaluated by texture coefficient (TC). The mean grain size and film thickness determined by SEM could be controlled over a range of 50-325 nm and 80-2690 nm, respectively.
