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Electrostatic control and new device handling consideration for MEMS manufacturing process
Author(s)
Chakkaew, Anusorn
Titiroongruang, Wisut
Date Issued
January 1, 2012
Type
Conference Paper
Abstract
Electrostatic potential and electrostatic discharge (ESD) has been a factory issue for years, not only limited to semiconductor-based electronic devices, but there are evidences that new devices from emerging technologies become sensitive which are MEMS and NEMS. This paper describes new electrostatic control and device handling solutions for critical electrostatic control environment for MEMS manufacturing processes. There are experiments of personnel grounding devices, device handling materials, and evaluation of static control surfaces.
Citation
Advanced Materials Research, 378-379, 659-662, 2012