Development of Hetero-Junction Cells with a DLC Film Anti-reflection Layer

Abstract

Diamond-like carbon (DLC) films were synthesized on glass slides and heterojunction cells by ECR-CVD (Electron-Cyclotron Resonance Plasma-Enhanced Chemical-Vapor Deposition) method using acetylene (C2H2), nitrogen (N2) gases and substate bias at 0,50,100 V. We investigate the effects of varying substrate bias on the characteristics of DLC film and its optical properties. Their characteristics were analyzed using the Raman technique the D and G peaks at approximately 1356 ± 5 cm−1 and 1578 ± 5 cm−1 respectively. The film's surface was examined using AFM imaging. Films with increased substrate biasing tend to exhibit a smoother surface. The film thickness varies depending on substrate biasing and nitrogen doping. The best light transmission was observed in films without substrate biasing. Analysis of the IV characteristics in experimental heterojunction cells revealed that cells with synthesized DLC films showed an efficiency increase from 0.74% to 0.78%. For cells doped with nitrogen, the efficiency rose from 0.74% to 0.79%. The DLC film has hydrogen bonding that can help enhance the efficiency of ITO.