Loading...
F-doped nanocrystalline SnO2 thin films for liquid petroleum gas (LPG) sensors
Author(s)
Date Issued
October 4, 2011
Type
Conference Paper
Abstract
In this paper we reported the improvement sensing performance of nanocrystalline SnO2 thin film based LPG sensors by doping with fluorine. Un-doped and F-doped tin oxide films were prepared on glass substrates by dip-coating technique using a layer-by-layer deposition cycle (alternating between dip-coating a thin layer followed by a drying in air after each new layer). The results showed that this technique is superior to the conventional technique for both improving the film thickness uniformity and film transparency. Atomic Force Microscopy (AFM) and X-ray diffraction pattern measurements showed that the obtained thin films were nanocrystalline SnO 2. Gas sensing characteristics (sensor response, response/recovery time and repeatability) of the nanocrystalline SnO2 sensors based on a planar interdigital structure were investigated at different operating temperatures and different LPG concentrations. The addition of fluorine to SnO2 was found to be advantageous for efficient detection of LPG gases, e.g. F-doped sensors were more stable at low operating temperature and had higher sensor response and faster response/recovery time, compared to un-doped sensor material. © 2011 IEEE.
Citation
NEMS 2011 6th IEEE International Conference on Nano Micro Engineered and Molecular Systems, 262-266, 2011