A humidity sensor based on iron oxide films prepared by spin coating process

Abstract

In present work, iron oxide films were prepared by spin coating technique. The effect of annealing temperature on the properties of films was investigated. The structural and surface morphology properties of films have been performed by X-ray diffraction, Fourier transform infrared spectroscopy, and field-emission scanning electron microscope. To fabricate the humidity sensor device, the iron oxide film was spun on indium tin oxide transparent electrode. The sensor exhibited the humidity response in the range of 23-93% RH. The mechanisms and equivalent circuit models of sensor can be explained by complex impedance measurement.