Synchrotron-based NEXAFS analysis of thermal-treated diamond-like carbon films

Chunjaemsri, Thanun; Chanlek, Narong; Sukkha, Usa; Nakajima, Hideki; Rujirawat, Saroj; Yimnirun, Rattikorn; Kidkhunthod, Pinit

doi:10.1016/j.radphyschem.2019.04.021

Synchrotron-based NEXAFS analysis of thermal-treated diamond-like carbon films

Author(s)

Chunjaemsri, Thanun

Chanlek, Narong

Sukkha, Usa

Nakajima, Hideki

Rujirawat, Saroj

Yimnirun, Rattikorn

Kidkhunthod, Pinit

Date Issued

October 1, 2020

Type

Article

DOI

10.1016/j.radphyschem.2019.04.021

Abstract

Diamond-like carbon (DLC) film properties are known to vary with important factors such as the ratio of sp³ to sp² hybridization, film thickness, and contaminations. In this work, the carbon bonding contents in DLC thin films, thermal-treated with various temperatures between room temperature to 250 °C, were studies by near-edge X-ray absorption fine structure (NEXAFS), X-ray photoelectron spectroscopy (XPS), and Raman spectroscopy. From NEXAFS measurements, the sp³/sp² ratios of DLC films were found to be unaffected by the thermal treatments. The results indicate that thermal treatment below 250 °C does not affect the carbon bonding contents in DLC thin film.

Citation

Radiation Physics and Chemistry, 175, 2020

Subjects

DLC films

NEXAFS

Raman spectroscopy

X-ray photoelectron s...