Novel preparation and characterization of fe2 o3 /cnt thin films for flammable gas sensors

Abstract

In this work, novel preparation for Fe2 O3 /CNT thin films was investigated. The Fe/CNT thin films were synthesized through vertical floating-catalyst chemical vapor deposition technique (FC-CVD) and subsequently annealed in air. The various annealing temperature to create Fe2 O3 was examined and characterized by field emission scanning electron microscopy (FE-SEM), thermogravimetric analysis (TGA), X-ray photoelectron spectroscopy (XPS), Ultraviolet–visible spectroscopy (UV-Vis) and Raman spectroscopy. In addition, effect of wet/dry process on gas sensing of Fe2 O3 /CNTs was also investigated. The results suggest that the interfacial oxide layer helps to significantly improve LPG sensing performance with rapid response and recovery times. The proposed method can be considered as a promising approach for producing ultra-Fe2 O3 /CNT thin films that are appropriate for sensing application.