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Design and simulation investigation of si3n4 photonics circuits for wideband on-chip optical gas sensing around 2 µm optical wavelength
Author(s)
Koompai, Natnicha
Chaisakul, Papichaya
Roux, Xavier Le
Vivien, Laurent
Marris-Morini, Delphine
Date Issued
April 1, 2021
Type
Article
Abstract
We theoretically explore the potential of Si3N4 on SiO2 waveguide platform toward a wideband spectroscopic detection around the optical wavelength of 2 µm. The design of Si3N4 on SiO2 waveguide architectures consisting of a Si3N4 slot waveguide for a wideband on-chip spectroscopic sensing around 2 µm, and a Si3N4 multi-mode interferometer (MMI)-based coupler for light coupling from classical strip waveguide into the identified Si3N4 slot waveguides over a wide spectral range are investigated. We found that a Si3N4 on SiO2 slot waveguide structure can be designed for using as optical interaction part over a spectral range of interest, and the MMI structure can be used to enable broadband optical coupling from a strip to the slot waveguide for wideband multi-gas on-chip spectroscopic sensing. Reasons for the operating spectral range of the system are discussed.
Citation
Sensors, 21(7), 2021