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Chemical etching of glass substrates
Author(s)
Van Toan, Nguyen
Toda, Masaya
Xue, Gaopeng
Gobpant, Jakrit
Sabran, Nuur Syahidah
Kiat, Jun Hieng
Samat, Khairul Fadzli
Ono, Takahito
Date Issued
January 1, 2026
Type
Book Chapter
Abstract
MEMS and microfluidics represent the forefront of technological innovation, spearheading a transformative era in precision control over fluids and mechanical components at scales that were once unimaginable. These groundbreaking technologies have transcended conventional boundaries and are now at the heart of numerous applications [1-3], spanning a wide spectrum of industries. From pioneering advancements in advanced medical diagnostics, where the manipulation of minute biological samples is essential, to the intricate networks that facilitate seamless telecommunications [4, 5], MEMS and microfluidics have become indispensable tools, exemplifying unparalleled efficiency, versatility, and cost-effectiveness. The ability to navigate and manipulate the microscopic and nanoscopic realms with precision opens new frontiers, promising advancements that not only redefine our technological landscape but also significantly impact the way we approach challenges across diverse sectors.
Citation
Micro Fluidic and Micro Electromechanical System Applications Subtractive Processing of Glass Substrates, 71-95, 2026