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Effect of two-step deposition process on morphology and optical properties of nanostructured diamond films
Author(s)
Tipawan Khlayboonme, S.
Techitdheera, W.
Thowladda, Warawoot
Date Issued
February 19, 2013
Type
Conference Paper
Abstract
The morphology and optical properties of nanostructured diamond films affected by the two-step deposition process with changing CH4 concentration were investigated. The CH4 concentration was 1% for the first step and 2% for the second step. The films were prepared by chemical vapor deposition in a microwave plasma reactor with a CH4/H2 gas mixture. Nanocrystalline columnar-structured diamond film with lowering of sp2-bonded carbon content was achieved by the two-step deposition process. Unlike that of the single-step process with 1%CH4, the two-step process promoted the morphology to more uniform and smoother film. The two-step process increased the higher grain boundary as well as decreased the sp2-bonded carbon content in the film, as compared with the single-step process with 2%CH4. © (2013) Trans Tech Publications, Switzerland.
Citation
Advanced Materials Research, 651, 148-153, 2013