An interferometric back focal plane microellipsometry for the determination of optical properties of a slider's air bearing surface

Khunrattanasiri, Weerayuth; Boonsang, Siridech

doi:10.1109/APSIPA.2014.7041800

An interferometric back focal plane microellipsometry for the determination of optical properties of a slider's air bearing surface

Author(s)

Khunrattanasiri, Weerayuth

Boonsang, Siridech

Date Issued

February 12, 2014

Type

Conference Paper

DOI

10.1109/APSIPA.2014.7041800

Abstract

This paper presents a back focal plane microellipsometer combined with a polarized shifting interferometer. This system is used for the determination of optical phase shift on reflection of a slider's air bearing surface. These optical properties are essential parameters for the flying height measurements in a HDD manufacturing process. The resulting phase shifting images were processed by using Windowed Fourier filters and phase unwrapping techniques, in order to precisely determine the phase of a back focal plane image. The phase images were then used to determine the optical phase shift on reflection values. The results from an aluminum sample show that the measured optical phase shift on reflection values are comparable to the standard values.

Citation

2014 Asia Pacific Signal and Information Processing Association Annual Summit and Conference Apsipa 2014, 2014