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Numerical study of temperature profile on diamond-like carbon thin films under different laser pulses
Author(s)
Date Issued
January 1, 2017
Type
Conference Paper
Abstract
In this work, a numerical analysis of the coupled thermal-optical problem for a diamond-like carbon (DLC) thin films deposited on Si-wafer substrate under different laser pulses were investigated. Four different shapes of pulse laser (ruby laser; λ=694 nm, power 0.60 J/cm2), consisting of rectangular, symmetric triangular, Gaussian and Weibull were employed in the numerical simulation using Maxwell's equations and heat conduction equation in one dimensional. The thermal and optical properties of material are temperature dependent. The energy absorption and temperature profile of DLC films is solved by an explicit finite difference method. The results show that energy absorption within DLC films exhibits gradually decreasing from its surface to Si-substrate at all different pulsed shapes. The energy absorption is in the order of 1017-1018 W/m3 and characteristic as a function of time is similar the pulse shapes pattern. The corresponding temperature depth profiles show the increasing temperature from surface and then gradually decreased near the substrate in the range of 1000-1800 K. In addition, the different laser pulses affect the temperature rising speed and the temperature profile distribution. In the conclusion, Weibull pulse is the most appropriate in order to obtain high speed heating, and the uniformity profile within DLC films.
Citation
Materials Today Proceedings, 4(5), 6349-6357, 2017