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Synthesis and characterization of Cu-doped SnO2 thin films by aerosol pyrolysis technique for gas sensor application
Author(s)
Tipawan, S. Khlayboonme
Warawoot, Thowladda
Date Issued
January 1, 2018
Type
Conference Paper
Abstract
Thin films of un-doped and Cu-doped tin oxide were synthesized on quartz substrates by the purpose-built aerosol pyrolysis apparatus from 0.2 M SnCl4.5H2O – ethanol solution. CuCl2.2H2O was used as a source of Cu dopant. The Cu dopant of 1, 3 and 5 wt.% were used for doping SnO2 film. The morphological, structural, optical and electrical properties under the influence of the Cu-doping was examined by FE-SEM, XRD, UV-Vis transmission spectroscopy and Hall effect measurement technique. XRD patterns of all films exhibited rutile-phase SnO2. The doping content of 1%Cu improved the film crystallinity. The Cu doping content decreased optical bandgap from 4.36 eV for undoped SnO2 to 4.28 eV for 3%Cu-doped SnO2. The further Cu doping content increased the bandgap energy to 4.32 eV. The resistivity was increased for doping of Cu 1% but it was decreased with further increasing in Cu-doping contents.
Citation
Key Engineering Materials, 766 KEM, 205-210, 2018