Spectroscopic ellipsometry study on aluminium-doped zinc oxide thin films prepared via DC magnetron sputtering and HiPIMS

Chittinan, Donyawan; Lertvanithphol, Tossaporn; Seawsakul, Kittikhun; Songsiriritthigul, Prayoon; Poolcharuansin, Phitsanu; Horprathum, Mati; Buranasiri, Prathan

Spectroscopic ellipsometry study on aluminium-doped zinc oxide thin films prepared via DC magnetron sputtering and HiPIMS

Author(s)

Chittinan, Donyawan

Lertvanithphol, Tossaporn

Seawsakul, Kittikhun

Songsiriritthigul, Prayoon

Poolcharuansin, Phitsanu

Horprathum, Mati

Buranasiri, Prathan

Date Issued

January 1, 2019

Type

Conference Paper

Abstract

Spectroscopic ellipsometry was used to investigate the properties of aluminium-doped zinc oxide (AZO) thin films deposited on silicon (100) substrate via magnetron sputtering system. The different techniques were used to fabricate including conventional DC magnetron sputtering and high-power impulse magnetron sputtering (HiPIMS). The ellipsometric spectra of the prepared samples were performed in the range of 1.75 to 3.5 eV with 0.025 eV intervals at incident angle of 70 degree. Two different optical models based on Cauchy and Tauc-Lorentz functions were used to fit and compared. The results showed that the Tauc-Lorentz based model was better to fit and extract the properties of interest including thin film thickness and refractive index (n). In addition, the fieldemission scanning electron microscopy (FE-SEM) images were used to confirm the results of thickness and ensure the using of Tauc-Lorentz model.

Citation

Proceedings of SPIE the International Society for Optical Engineering, 11142, 2019