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Reflection image model for micro-ellipsometer
Author(s)
Khunrattanasiri, Weerayuth
Date Issued
July 1, 2019
Type
Conference Paper
Abstract
High accurate distance measurement currently favors optical techniques. Ellipsometer usually can find the optical properties. The data from the Ellipsometer will transfer to distance data but micro-ellipsometer can provide more accurate than general ellipsometer. The micro-ellipsometer use the back focal plane of an objective lens and measures the optical properties in the different angles. The micro-ellipsometer result is the intensity image. The light reflection model can give us original light reflection images of any objects by determining the refractive index of the material and create a reflection image model. This research created optical reflection models of Si O2, Au, Ti and Al.
Citation
Proceedings of the 16th International Conference on Electrical Engineering Electronics Computer Telecommunications and Information Technology Ecti Con 2019, 136-139, 2019