Electrostatic Control and New Device Handling Consideration for MEMS Manufacturing Process

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dc.contributor.authorAnusorn Chakkaew
dc.contributor.authorWisut Titiroongruang
dc.date.accessioned2025-07-21T05:52:22Z
dc.date.issued2011-10-01
dc.identifier.doi10.4028/www.scientific.net/amr.378-379.659
dc.identifier.urihttps://dspace.kmitl.ac.th/handle/123456789/3122
dc.subjectNanoelectromechanical systems
dc.subjectFactory (object-oriented programming)
dc.subjectSemiconductor device fabrication
dc.subjectElectrostatics
dc.subject.classificationAdvanced MEMS and NEMS Technologies
dc.titleElectrostatic Control and New Device Handling Consideration for MEMS Manufacturing Process
dc.typeArticle

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