Electrostatic discharge simulation and experimental analysis of electrostatic control in electronic device manufacturing
| dc.contributor.author | Anusorn Chakkaew | |
| dc.contributor.author | Wisut Titiroongruang | |
| dc.date.accessioned | 2025-07-21T05:52:36Z | |
| dc.date.issued | 2012-01-01 | |
| dc.identifier.doi | 10.1504/ijmpt.2012.050187 | |
| dc.identifier.uri | https://dspace.kmitl.ac.th/handle/123456789/3279 | |
| dc.subject | Electrostatics | |
| dc.subject | Nanoelectromechanical systems | |
| dc.subject | Factory (object-oriented programming) | |
| dc.subject.classification | Electrostatic Discharge in Electronics | |
| dc.title | Electrostatic discharge simulation and experimental analysis of electrostatic control in electronic device manufacturing | |
| dc.type | Article |