Electrostatic discharge simulation and experimental analysis of electrostatic control in electronic device manufacturing

Electrostatic potential and electrostatic discharge (ESD) have been a factory issue for years, not only limited to semiconductor-based electronic devices, hard dish drive assemblies, and microelectromechanical systems and nanoelectromechanical systems devices, which are extremely sensitive to electrostatic field and the ESD. This paper presents ESD simulation and experimental analysis of electrostatic control in electronic device manufacturing. There are experiments of electrostatic on personnel, personnel grounding through wrist strap, through constant wrist strap monitor, and with static control footwear and floorings, machine grounding consideration, device handling materials, and ESD characterisation of static control surfaces for small and light devices. Copyright © 2012 Inderscience Enterprises Ltd.