Micro Plasma Source Design Using WGMs a PANDA Ring

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dc.contributor.authorR. Siriroj
dc.contributor.authorK. Srinuanjan
dc.contributor.authorP.P. Yupapin
dc.date.accessioned2025-07-21T05:55:01Z
dc.date.issued2014-06-24
dc.identifier.doi10.4028/www.scientific.net/amr.979.3
dc.identifier.urihttps://dspace.kmitl.ac.th/handle/123456789/4656
dc.subjectPlasma cleaning
dc.subject.classificationPlasma Diagnostics and Applications
dc.titleMicro Plasma Source Design Using WGMs a PANDA Ring
dc.typeArticle

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