Synchrotron-based NEXAFS analysis of thermal-treated diamond-like carbon films

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dc.contributor.authorChunjaemsri, Thanun
dc.contributor.authorChanlek, Narong
dc.contributor.authorSukkha, Usa
dc.contributor.authorNakajima, Hideki
dc.contributor.authorRujirawat, Saroj
dc.contributor.authorYimnirun, Rattikorn
dc.contributor.authorKidkhunthod, Pinit
dc.date.accessioned2026-08-06T10:29:45Z
dc.date.available2026-08-06T10:29:45Z
dc.date.issued2020-10-01
dc.description.abstractDiamond-like carbon (DLC) film properties are known to vary with important factors such as the ratio of sp<sup>3</sup> to sp<sup>2</sup> hybridization, film thickness, and contaminations. In this work, the carbon bonding contents in DLC thin films, thermal-treated with various temperatures between room temperature to 250 °C, were studies by near-edge X-ray absorption fine structure (NEXAFS), X-ray photoelectron spectroscopy (XPS), and Raman spectroscopy. From NEXAFS measurements, the sp<sup>3</sup>/sp<sup>2</sup> ratios of DLC films were found to be unaffected by the thermal treatments. The results indicate that thermal treatment below 250 °C does not affect the carbon bonding contents in DLC thin film.
dc.identifier.citationRadiation Physics and Chemistry, 175, 2020
dc.identifier.doi10.1016/j.radphyschem.2019.04.021
dc.identifier.issn0969806X
dc.identifier.other2-s2.0-85082518376
dc.identifier.urihttps://dspace.kmitl.ac.th/handle/123456789/11282
dc.sourceRadiation Physics and Chemistry
dc.subjectDLC films
dc.subjectNEXAFS
dc.subjectRaman spectroscopy
dc.subjectX-ray photoelectron spectroscopy
dc.titleSynchrotron-based NEXAFS analysis of thermal-treated diamond-like carbon films
dc.typeArticle

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