A new generation optical lithography using a third harmonic pulse generated by micro-ring resonators

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dc.contributor.authorP.P. Yupapin
dc.contributor.authorS. Chaiyasoonthorn
dc.contributor.authorO. Saneujit
dc.date.accessioned2025-07-21T05:50:25Z
dc.date.issued2009-01-02
dc.identifier.doi10.1016/j.ijleo.2008.09.012
dc.identifier.urihttps://dspace.kmitl.ac.th/handle/123456789/2007
dc.subjectHarmonic
dc.subject.classificationPhotonic and Optical Devices
dc.titleA new generation optical lithography using a third harmonic pulse generated by micro-ring resonators
dc.typeArticle

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