Determination of Thickness and Optical Properties of Tantalum Oxide Thin Films by Spectroscopic Ellipsometry

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dc.contributor.authorChanunthorn Chananonnawathorn
dc.contributor.authorNarathon Khemasiri
dc.contributor.authorThanat Srichaiyaperk
dc.contributor.authorBenjarong Samransuksamer
dc.contributor.authorMati Horprathum
dc.contributor.authorPitak Eiamchai
dc.contributor.authorSaksorn Limwichean
dc.contributor.authorKamon Aiempanakit
dc.contributor.authorPongpan Chindaudom
dc.date.accessioned2025-07-21T05:55:01Z
dc.date.issued2014-06-24
dc.identifier.doi10.4028/www.scientific.net/amr.979.244
dc.identifier.urihttps://dspace.kmitl.ac.th/handle/123456789/4650
dc.subjectEllipsometry
dc.subjectDeposition
dc.subject.classificationOptical Coatings and Gratings
dc.titleDetermination of Thickness and Optical Properties of Tantalum Oxide Thin Films by Spectroscopic Ellipsometry
dc.typeArticle

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