The Influence of N<sub>2</sub> Partial Pressure on Color, Mechanical, and Corrosion Properties of TiN Thin Films Deposited by DC Reactive Magnetron Sputtering

dc.contributor.authorPisitpat Nimnual
dc.contributor.authorAparporn Sakulkalavek
dc.contributor.authorRachsak Sakdanuphab
dc.date.accessioned2025-07-21T05:56:07Z
dc.date.issued2015-08-01
dc.identifier.doi10.4028/www.scientific.net/kem.659.550
dc.identifier.urihttps://dspace.kmitl.ac.th/handle/123456789/5300
dc.subjectPartial pressure
dc.subject.classificationMetal and Thin Film Mechanics
dc.titleThe Influence of N<sub>2</sub> Partial Pressure on Color, Mechanical, and Corrosion Properties of TiN Thin Films Deposited by DC Reactive Magnetron Sputtering
dc.typeArticle

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