Improvement of Structural, Morphological and Mechanical Properties of CrN<sub>x</sub> Sputtered Thin Films by Vacuum Annealing Process

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dc.contributor.authorIntira Nualkham
dc.contributor.authorRachsak Sakdanuphab
dc.contributor.authorAparporn Sakulkalavek
dc.date.accessioned2025-07-21T05:58:30Z
dc.date.issued2017-08-01
dc.identifier.doi10.4028/www.scientific.net/kem.751.113
dc.identifier.urihttps://dspace.kmitl.ac.th/handle/123456789/6642
dc.subjectPartial pressure
dc.subject.classificationMetal and Thin Film Mechanics
dc.titleImprovement of Structural, Morphological and Mechanical Properties of CrN<sub>x</sub> Sputtered Thin Films by Vacuum Annealing Process
dc.typeArticle

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