Design consideration and finite element modeling of MEMS cantilever for nano-biosensor applications

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dc.contributor.authorD. Klaitabtim
dc.contributor.authorA. Tuantranont
dc.date.accessioned2025-07-21T05:48:12Z
dc.date.issued2005-09-09
dc.identifier.doi10.1109/nano.2005.1500758
dc.identifier.urihttps://dspace.kmitl.ac.th/handle/123456789/789
dc.subjectPiezoresistive effect
dc.subjectSurface stress
dc.subject.classificationMechanical and Optical Resonators
dc.titleDesign consideration and finite element modeling of MEMS cantilever for nano-biosensor applications
dc.typeArticle

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