A new generation optical lithography using a third harmonic pulse generated by micro-ring resonators

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dc.contributor.authorYupapin, P. P.
dc.contributor.authorChaiyasoonthorn, S.
dc.contributor.authorSaneujit, O.
dc.date.accessioned2026-08-06T10:00:01Z
dc.date.available2026-08-06T10:00:01Z
dc.date.issued2010-03-01
dc.description.abstractWe first propose a new system of a third harmonic generation by using a soliton pulse circulating in the integrated micro-ring devices. By using this system, the ultra-short pulse in the attosecond (as) and beyond can be easily generated. In principle, light pulse known as a soliton pulse is input into a design system. It consist the three-stage micro-ring resonators, where the ring radii are within the range between 5 and 35 μm. With the appropriate parameters such as ring radius, coupling ratio and nonlinear refractive index, the attosecond pulse is generated by filtering the chaotic signals within the micro-ring devices. One of the results obtained has shown that the generation of the ultra narrow pulse (spectral width) and sharp tip is achieved. The potential of using such a pulse for picometer (pm)-scale lithography is plausible. © 2008 Elsevier GmbH. All rights reserved.
dc.identifier.citationOptik, 121(6), 563-566, 2010
dc.identifier.doi10.1016/j.ijleo.2008.09.012
dc.identifier.issn00304026
dc.identifier.other2-s2.0-77649187608
dc.identifier.urihttps://dspace.kmitl.ac.th/handle/123456789/2983
dc.sourceOptik
dc.subjectHigh-resolution lithography
dc.subjectNew generation lithography
dc.subjectNonlinear micro-ring resonator
dc.titleA new generation optical lithography using a third harmonic pulse generated by micro-ring resonators
dc.typeArticle

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