Fabrication of amorphous silicon nanocones by bias-enhanced microwave plasma CVD

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dc.contributor.authorSutichai Chaisitsak
dc.date.accessioned2025-07-21T05:48:56Z
dc.date.issued2006-12-21
dc.identifier.doi10.1016/j.mseb.2006.11.019
dc.identifier.urihttps://dspace.kmitl.ac.th/handle/123456789/1200
dc.subjectMicrometer
dc.subjectNanocrystalline silicon
dc.subject.classificationSilicon Nanostructures and Photoluminescence
dc.titleFabrication of amorphous silicon nanocones by bias-enhanced microwave plasma CVD
dc.typeArticle

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