A simulation of air bearing surface materials with copper substrate for corrosion investigation

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dc.contributor.authorSanti Chatruprachewin
dc.contributor.authorChaiwat Nuthong
dc.date.accessioned2025-07-21T05:53:49Z
dc.date.issued2013-05-01
dc.identifier.doi10.1109/ecticon.2013.6559525
dc.identifier.urihttps://dspace.kmitl.ac.th/handle/123456789/3971
dc.subjectPhotoresist
dc.subjectNyquist plot
dc.subjectChemical Mechanical Planarization
dc.subject.classificationAdhesion, Friction, and Surface Interactions
dc.titleA simulation of air bearing surface materials with copper substrate for corrosion investigation
dc.typeArticle

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