Design Optimization of CMOS- MEMS Staggered Vertical Comb Based Micro Scanners

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dc.contributor.authorWenhao Chen
dc.contributor.authorMingzheng Duani
dc.contributor.authorHadi Tavakkoli
dc.contributor.authorHuahuang Luo
dc.contributor.authorBin Zhao
dc.contributor.authorWibool Piyawattanametha
dc.contributor.authorYi-Kuen Lee
dc.date.accessioned2025-07-21T06:07:53Z
dc.date.issued2022-10-30
dc.identifier.doi10.1109/sensors52175.2022.9967132
dc.identifier.urihttps://dspace.kmitl.ac.th/handle/123456789/11759
dc.subjectFigure of Merit
dc.subject.classificationAdvanced MEMS and NEMS Technologies
dc.titleDesign Optimization of CMOS- MEMS Staggered Vertical Comb Based Micro Scanners
dc.typeArticle

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