Chemical etching of glass substrates

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dc.contributor.authorVan Toan, Nguyen
dc.contributor.authorToda, Masaya
dc.contributor.authorXue, Gaopeng
dc.contributor.authorGobpant, Jakrit
dc.contributor.authorSakulkalavek, Aparporn
dc.contributor.authorSabran, Nuur Syahidah
dc.contributor.authorKiat, Jun Hieng
dc.contributor.authorSamat, Khairul Fadzli
dc.contributor.authorOno, Takahito
dc.date.accessioned2026-08-06T10:54:00Z
dc.date.available2026-08-06T10:54:00Z
dc.date.issued2026-01-01
dc.description.abstractMEMS and microfluidics represent the forefront of technological innovation, spearheading a transformative era in precision control over fluids and mechanical components at scales that were once unimaginable. These groundbreaking technologies have transcended conventional boundaries and are now at the heart of numerous applications [1-3], spanning a wide spectrum of industries. From pioneering advancements in advanced medical diagnostics, where the manipulation of minute biological samples is essential, to the intricate networks that facilitate seamless telecommunications [4, 5], MEMS and microfluidics have become indispensable tools, exemplifying unparalleled efficiency, versatility, and cost-effectiveness. The ability to navigate and manipulate the microscopic and nanoscopic realms with precision opens new frontiers, promising advancements that not only redefine our technological landscape but also significantly impact the way we approach challenges across diverse sectors.
dc.identifier.citationMicro Fluidic and Micro Electromechanical System Applications Subtractive Processing of Glass Substrates, 71-95, 2026
dc.identifier.doi10.1201/9781003735908-7
dc.identifier.other2-s2.0-105031539819
dc.identifier.urihttps://dspace.kmitl.ac.th/handle/123456789/17711
dc.sourceMicro Fluidic and Micro Electromechanical System Applications Subtractive Processing of Glass Substrates
dc.titleChemical etching of glass substrates
dc.typeBook Chapter

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