Theoretical and Experimental Study of Comb-Actuated Mirror with Cascaded Structures

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dc.contributor.authorWenhao Chen
dc.contributor.authorHuahuang Luo
dc.contributor.authorMingzheng Duan
dc.contributor.authorHadi Tavakkoli
dc.contributor.authorWibool Piyawattanametha
dc.contributor.authorYi-Kuen Lee
dc.date.accessioned2026-05-08T19:22:15Z
dc.date.issued2023-7-30
dc.description.abstractFor the first time, we present a two-dimensional theoretical model for one-dimensional comb-actuated MEMS mirror with cascaded structures. The numerical model including different damping mechanisms and nonlinear capacitive force is validated with experiment results. Stability analysis is conducted to simulate the nonlinear hysteretic frequency response. The model proposed can be a guideline for designing multi-degree-of-freedom nonlinear parametric-excited MEMS mirror with high frequency and large scan angle.
dc.identifier.doi10.1109/omn/sbfotoniopc58971.2023.10230961
dc.identifier.urihttps://dspace.kmitl.ac.th/handle/123456789/18433
dc.subjectAdvanced MEMS and NEMS Technologies
dc.subjectAdvanced Fiber Optic Sensors
dc.subjectPhotonic and Optical Devices
dc.titleTheoretical and Experimental Study of Comb-Actuated Mirror with Cascaded Structures
dc.typeArticle

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