Silicon anisotropic etching of TMAH solution

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dc.contributor.authorW. Sonphao
dc.contributor.authorS. Chaisirikul
dc.date.accessioned2025-07-21T05:47:22Z
dc.date.issued2002-11-13
dc.identifier.doi10.1109/isie.2001.932030
dc.identifier.urihttps://dspace.kmitl.ac.th/handle/123456789/343
dc.subject.classificationAdvanced MEMS and NEMS Technologies
dc.titleSilicon anisotropic etching of TMAH solution
dc.typeArticle

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