Sensing layer combination of vertically aligned ZnO nanorods and graphene oxide for ultrahigh sensitivity IDE capacitive humidity sensor

Simple item page
dc.contributor.authorPongampai, Satana
dc.contributor.authorPengpad, Puttapon
dc.contributor.authorMeananeatra, Rattanawan
dc.contributor.authorChaisriratanakul, Woraphan
dc.contributor.authorPoyai, Amporn
dc.contributor.authorHorprathum, Mati
dc.contributor.authorChananonnawathorn, Chanunthorn
dc.contributor.authorTitiroongruang, Wisut
dc.contributor.authorMuanghlua, Rangson
dc.date.accessioned2026-08-06T10:28:49Z
dc.date.available2026-08-06T10:28:49Z
dc.date.issued2020-06-01
dc.description.abstractAn interdigitated electrode (IDE) capacitive humidity sensor fabricated on a silicon substrate was used to investigate sensing materials, which proved to be an ultrahigh-sensitivity humidity sensor. A sensing layer combination (SLC) between vertically aligned ZnO nanorods and optimal graphene oxide (GO) was prepared on the device and was tested as a humidity sensor. X-ray diffractometry (XRD) exhibited crystallized wurtzite structure of ZnO nanorods and transmission electron microscope (TEM) shown perfectly indexed hexagonal wurtzite ZnO structure dots position correspondence. A scanning electron microscope (SEM) was used to analyze ZnO nanorods/GO morphologies. Furthermore, Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) clearly exhibited GO presence and hydrophilic functional groups (carboxyl, epoxy, and hydroxyl), respectively. The SLC prominently demonstrated ultrahigh sensitivity (up to 196.95% or 1.97 times from commercial sensor; HS1101, Humirel) and linear responses behavior with 0.96 for coefficient of determination. The device sensitivity obviously improved as steps of 40, 50, 60, 70, 80, and 90% RH at values of 1.09, 1.41, 1.51, 1.65, 1.80, and 1.91 times, respectively. The device also exhibited fast response (25 s) and short recovery times (17 s). Its hysteresis (6.58%) manifestly improved to 1.84 times. Moreover, repeatability and long-term ability of the device demonstrated high accuracy (range ±0.37pF) and durability. © 2020 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.
dc.identifier.citationIeej Transactions on Electrical and Electronic Engineering, 15(6), 965-975, 2020
dc.identifier.doi10.1002/tee.23140
dc.identifier.issn19314973
dc.identifier.other2-s2.0-85084108098
dc.identifier.urihttps://dspace.kmitl.ac.th/handle/123456789/11007
dc.sourceIeej Transactions on Electrical and Electronic Engineering
dc.subjectgraphene oxide
dc.subjecthumidity sensor
dc.subjectsensing layer combination (SLC)
dc.subjectultrahigh sensitivity
dc.subjectZnO nanorods
dc.titleSensing layer combination of vertically aligned ZnO nanorods and graphene oxide for ultrahigh sensitivity IDE capacitive humidity sensor
dc.typeArticle

Files

Collections

Research