Alcohol vapor detection by using nanoporous silicon as based sensor

In this paper, we are concerned with fabrication of alcohol vapor sensor based on nanoporous silicon. In order to use nanoporous silicon as alcohol vapor sensor, we made nanoporous silicon onto p-type silicon wafer by electrochemical etching of silicon wafer in hydrofluoric acid solution. The structure of this sensor consists of nanoporous silicon layer and aluminum electrode which is deposited on the top of nanoporous silicon layer by evaporator. In this research, we are concerned the variation of electrical properties of this sensor due to presence of different concentration of alcohol vapor. From the experiment, it is found that this sensor can detect the different concentrations of alcohol vapor in the rang 1000 ppm to 250 ppm.