Silicon-Based MOEMS and Their Applications
| dc.contributor.author | Harald Schenk | |
| dc.contributor.author | Wibool Piyawattanametha | |
| dc.date.accessioned | 2025-07-21T05:49:36Z | |
| dc.date.issued | 2008-04-01 | |
| dc.description.abstract | The <i>Journal of Micro/Nanopatterning, Materials, and Metrology</i> (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry. | |
| dc.identifier.doi | 10.1117/1.2913329 | |
| dc.identifier.uri | https://dspace.kmitl.ac.th/handle/123456789/1576 | |
| dc.subject.classification | Advanced Surface Polishing Techniques | |
| dc.title | Silicon-Based MOEMS and Their Applications | |
| dc.type | Article |