Electrostatic Control and the Need of Feedback Control Ionization in Critical Environment of MEMS Manufacturing Process

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dc.contributor.authorAnusorn Chakkaew
dc.contributor.authorWisut Titiroongruang
dc.date.accessioned2025-07-21T05:51:18Z
dc.date.issued2010-03-09
dc.identifier.doi10.1149/1.3360727
dc.identifier.urihttps://dspace.kmitl.ac.th/handle/123456789/2526
dc.subject.classificationElectrostatic Discharge in Electronics
dc.titleElectrostatic Control and the Need of Feedback Control Ionization in Critical Environment of MEMS Manufacturing Process
dc.typeArticle

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