Phase-Shifting Interferometry for Surface Roughness Measurement on Glass Substrates

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dc.contributor.authorS. Suriyasirikun
dc.contributor.authorS. Tipawan Khlayboonme
dc.contributor.authorW. Thowladda
dc.date.accessioned2025-07-21T05:55:02Z
dc.date.issued2014-06-24
dc.identifier.doi10.4028/www.scientific.net/amr.979.463
dc.identifier.urihttps://dspace.kmitl.ac.th/handle/123456789/4659
dc.subjectFlatness (cosmology)
dc.subjectWhite light interferometry
dc.subjectStylus
dc.subject.classificationSurface Roughness and Optical Measurements
dc.titlePhase-Shifting Interferometry for Surface Roughness Measurement on Glass Substrates
dc.typeArticle

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