A micro-ellipsometry method based on polarization shifting interferometry for determining complex reflective index

Simple item page
dc.contributor.authorWeerayuth Khunrattanasiri
dc.contributor.authorSiridech Boonsang
dc.date.accessioned2025-07-21T05:57:08Z
dc.date.issued2016-08-01
dc.identifier.doi10.1109/ica.2016.7811477
dc.identifier.urihttps://dspace.kmitl.ac.th/handle/123456789/5874
dc.subjectFlying height
dc.subjectEllipsometry
dc.subjectAccuracy and precision
dc.subject.classificationOptical measurement and interference techniques
dc.titleA micro-ellipsometry method based on polarization shifting interferometry for determining complex reflective index
dc.typeArticle

Files

Collections

All