Use of Neural Network to Model the Refractive Property of PECVD Silicon Nitride Films used to Prevent Water Permeability of Piezoresistive Pressure Sensor

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dc.contributor.authorThongchai Thongvigitmanee
dc.contributor.authorArckom Srihapat
dc.contributor.authorCharoenchai Khompatraporn
dc.contributor.authorAdsada Jiraprayuklert
dc.contributor.authorWisut Titiroongruang
dc.date.accessioned2025-07-21T05:51:18Z
dc.date.issued2010-03-09
dc.identifier.doi10.1149/1.3360708
dc.identifier.urihttps://dspace.kmitl.ac.th/handle/123456789/2528
dc.subjectPassivation
dc.subjectPiezoresistive effect
dc.subject.classificationSemiconductor Lasers and Optical Devices
dc.titleUse of Neural Network to Model the Refractive Property of PECVD Silicon Nitride Films used to Prevent Water Permeability of Piezoresistive Pressure Sensor
dc.typeArticle

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