PHOTOREFLECTANCE STUDY OF AIN THIN FILMS GROWN BY REACTIVE GAS-TIMING RF MAGNETRON SPUTTERING

Simple item page
dc.contributor.authorN. KIETIPAISALSOPHON
dc.contributor.authorW. BUNJONGPRU
dc.contributor.authorJ. NUKEAW
dc.date.accessioned2025-07-21T05:47:23Z
dc.date.issued2002-11-20
dc.identifier.doi10.1142/s0217979202015522
dc.identifier.urihttps://dspace.kmitl.ac.th/handle/123456789/349
dc.subjectCavity magnetron
dc.subject.classificationGaN-based semiconductor devices and materials
dc.titlePHOTOREFLECTANCE STUDY OF AIN THIN FILMS GROWN BY REACTIVE GAS-TIMING RF MAGNETRON SPUTTERING
dc.typeArticle

Files

Collections

All