Theoretical and Experimental Study of Comb-Actuated Mirror with Cascaded Structures

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dc.contributor.authorWenhao Chen
dc.contributor.authorHuahuang Luo
dc.contributor.authorMingzheng Duan
dc.contributor.authorHadi Tavakkoli
dc.contributor.authorWibool Piyawattanametha
dc.contributor.authorYi-Kuen Lee
dc.date.accessioned2025-07-21T06:09:38Z
dc.date.issued2023-07-30
dc.identifier.doi10.1109/omn/sbfotoniopc58971.2023.10230961
dc.identifier.urihttps://dspace.kmitl.ac.th/handle/123456789/12700
dc.subjectComb drive
dc.subject.classificationAdvanced MEMS and NEMS Technologies
dc.titleTheoretical and Experimental Study of Comb-Actuated Mirror with Cascaded Structures
dc.typeArticle

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