Silicon Nitride Thin Films Deposited By Reactive Gas-timing Magnetron Sputtering For Protective Coating Applications - N. Khemasiri; N. Paleeya; D. Sae-tang Phromyothin; M. Horprathum; A. Sungthong; J. Nukeaw; S. Pratontep (My University, 2015)
Keywords: Auger electron spectroscopy; Diamond and Carbon-based Materials Research