Empirical modelling and optimization of pre-heat temperature and Ar flow rate using response surface methodology for stoichiometric Sb2Te3 thin films prepared by RF magnetron sputtering - Tanakorn Khumtong; Aparporn Sakulkalavek; Rachsak Sakdanuphab (My University, 2017)
Keywords: Stoichiometry; Cavity magnetron; Chalcogenide Semiconductor Thin Films