Effects of Annealing Process on the Electrical Properties of MEMS Capacitive Microphone - Jirawat Jantawong; Chana Leepattarapongpan; Ekalak Chaowicharat; Wutthinan Jeamsaksiri; Anu Austin; Kathirgamasundaram Sooriakumar; Surasak Niemcharoen (My University, 2018)
Keywords: Wafer Bonding; Advanced MEMS and NEMS Technologies