Formation of HfOxNy nanorod GLAD films growth by rapid thermal oxidation - W. Phae-ngam; J. Prathumsit; C. Chananonnawathorn; H. Nakajima; T. Lertvanithphol; T. Pogfay; N. Limsuwan; D. Phokharatkul; A. Vora-ud; N. Triamnak; A. Mungchamnankit; M. Horprathum; et al. (My University, 2022)
Keywords: Nanorod; Semiconductor materials and devices