Rational concept for fully designing metal-oxynitride films through reactive gas-timing magnetron sputtering: A case study on zinc oxynitride film - Narathon Khemasiri; Chanunthorn Chananonnawathorn; Mati Horprathum; Supanit Pornthreeraphat; Bunpot Saekow; Apirak Pankiew; Atipong Bootchanont; Prayoon Songsiriritthigul; Hideki Nakajima; Panita Kasamechonchung; Winadda Wongwiriyapan; Annop Klamchuen; et al. (Journal of Alloys and Compounds, 2025)
Keywords: ZnO doping and properties; Semiconductor materials and devices; Ga2O3 and related materials